Ushio USH1000FNL Flash UV Lamp for Nikon Stepper's (Photolithography)
With the same basic properties as super high pressure mercury lamps, flash UV lamps are developed as a light source for step-and-repeat wafer exposure devices. They operate at higher power during exposure than during stand-by, reducing heat and energy consumption.
Ushio USH1000FNL Specifications:
Rated Power: 1,000 Watts
Rated Current: 21.3 Amps
Average Life: 1,500 Hours
Burning Position: +/-10 Degrees
Cold Arc Gap Length: 3mm