Ushio 1000FGIL2 Flash UV Lamp for GCA Stepper's(Photolithography)
Mercury lamp for GCA model MAXIMUS 2000 Illuminator,
DSW 8500 I/I-Line
With the same basic properties as super high pressure mercury lamps, flash UV lamps are developed as a light source for step-and-repeat wafer exposure devices. They operate at higher power during exposure than during stand-by, reducing heat and energy consumption.
Ushio 1000FGIL2 Specifications:
Rated Power: 1,000 Watts
Rated Current: 21.3 Amps
Average Life: 1,500 Hours (2 Month PM)
Burning Position: +/-10 Degrees
Cold Arc Gap Length: 3mm